ltem | Data |
Device model | M82 750B 6K |
Operating system | SXG-MPCVD Control System |
Microwave Source | 2450MHz/6KW |
Chamber nominal power | ≤10KW |
Substrate size | φ2inches |
Working pressure | 10-200Torr |
Standardized gas confguration | 5 or 6 gas lines (can be customized) |
Temperature measurement | Infrared measurement temperature range 300~1400℃ |
System vacuum tightness (leak detection by helium mass spectrometer) | <1x10-9 Torr.L/sec |
Vacuum pump | 17.1 m3/H |
Equipment size | 1500MM（length）*800MM（depth）*1980MM（height） |
Equipment weight | 490kg |
ltem | Data |
Device model | M82 730 6K |
Operating system | SXG-MPCVD Control System |
Microwave Source | 2450MHz/6KW |
Chamber nominal power | ≤10KW |
Substrate size | φ2inches |
Working pressure | 10-200Torr |
Standardized gas confguration | 5 or 6 gas lines (can be customized) |
Temperature measurement | Infrared measurement temperature range 300~1400℃ |
System vacuum tightness (leak detection by helium mass spectrometer) | <1x10-9 Torr.L/sec |
Vacuum pump | 17.1 m3/H |
Equipment size | Chamber cabinet: 1500MM（length）*700MM（depth）*1880MM（height） |
Equipment weight | Chamber cabinet=375kg; Control cabinet=185kg |
